Process Catalog
Fraunhofer-Center Nanoelektronische Technologien
Analytics
| Capability | FEoL/BEoL | Wafer size |
| Transmission Electron Microscopy (TEM) | FEoL/BEoL | coupons |
| Focused Ion Beam (FIB) | FEoL/BEoL | coupons |
| Scanning Electron Microscopy | FEoL/BEoL | coupons |
| Atom Probe Tomography (APT) | FEoL/BEoL | coupons |
| Secondary Ion Mass Spectrometry (SIMS) | FEoL/BEoL | coupons |
| Time-of-flight SIMS (ToF-SIMS) | FEoL/BEoL | coupons |
| Energy Dispersive X-ray Analysis (EDX) in TEM | FEoL/BEoL | coupons |
| Electron Energy Loss Spectroscopy (EELS) in TEM | FEoL/BEoL | coupons |
| Total Reflection X-ray Fluorescence (TXRF) | FEoL/BEoL | coupons |
| X-ray Diffraction (XRD)/ X-ray Reflectrometry (XRR) | FEoL/BEoL | coupons |
| Raman Spectroscopy | FEoL | coupons |
| Raman Spectroscopy (UV) | FEoL | coupons |
| Fourier Transformed Infrared Spectroscopy (FTIR) | FEoL | coupons |
| Ellipsometry/Porosimetry | BEoL | coupons |
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