Tooling and Performance

Fraunhofer-Center Nanoelektronische Technologien

Coating and Development

  • Clean Track Act TM 12 (Tokyo Electron Ltd.)

    Clean Track

    The TEL ACT 12 Clean Track is a high volume Coater/Developer system, well known in semiconductor production.

  • Resist Laboratory

    Brewer Hotplate

    Brewer CEE 100 FX Hotplate (Brewer Science) Brewer CEE 100 Spin Coater (Brewer Science) Brewer CEE 200 FX Developer (Brewer Science)