Deutsch > Kompetenzgebiete > Patterning > Operation Areas
Patterning
Fraunhofer-Center Nanoelektronische Technologien
Operation Areas
Process Development
- Resist and material characterization
- Evaluation
Process Integration
- Novel HM stacks
- Allignment concepts
Technology Development
- Overlay
- Multi beam concepts
- Uniformity
- DataPrep software
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